Airgard
Description
pulled from site's meta descriptionAirgard's point-of-use fume scrubber can reduce a process tool's scrubber-related downtime to zero. Whether running epitaxial, metal etch, poly etch or CVD, the patented scrubbing technology, automated gas inlet plunger and custom scrubber inlets are tailored to individual processes to provide maximum uptime and process stability.
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Categories:
- AboutUs AutoGen
- Airgard
- Wet scrubbers
- Scrubbers
- Fume scrubbers
- Airguard
- Abatement
- Exhaust gasses
- Gas Treatment
- Acid fume scrubber
- Gas scrubbing
- Exhaust scrubbers
- Johnsgard
- Epi
- fume scrubbers
- Epi scrubbers
- Toxic gases
- Vector
- Ecosys
- Eco-sys
- ATMI
- CET
- Epitaxy
- Exhaust gas scrubbers
- Exhaust gas abatement
- Semiconductor gasses
- Environmental
- Gas cleaner
- Gas purifier
- Epitaxial
- Silicon tetrachloride
- Hydrogen chloride
- Chlorosilane
- Trichlorosilane
- Dichlorosilane
- Air guard
- airguard
- air gard
- airgaurd
- metal etch
- poly etch
- CVD
- gas
- inlet
- patented inlet
- water-soluble gases
- PLC control box
- packed column
- semiconductor gases
- toxic gasses